2D lithography mask simulation
Benchmarks
| Task Name | Dataset Name | SOTA Result | Trend | |
|---|---|---|---|---|
| 2D lithography mask simulation | 2D lithography mask simulation 11.2 nm wavelength (test) | Relative L2 Error3.3 | 2 | |
| 2D lithography mask simulation | 2D lithography mask simulation 13.5 nm wavelength (test) | Relative L2 Error3.1 | 2 |
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