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SOTA 2D lithography mask simulation benchmarks and papers with code | Wizwand
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2D lithography mask simulation
Benchmarks
Dataset Name
SOTA Method
Dataset Name
SOTA Method
Metric
Trend
Results
Last Updated
2D lithography mask simulation 11.2 nm wavelength (test)
PINN
Relative L2 Error
3.3
2
4mo ago
2D lithography mask simulation 13.5 nm wavelength (test)
PINN
Relative L2 Error
3.1
2
4mo ago
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