3D lithography mask simulation
Benchmarks
| Task Name | Dataset Name | SOTA Result | Trend | |
|---|---|---|---|---|
| 3D lithography mask simulation | 3D lithography mask simulation 11.2 nm | Rel. L2 Error2.8 | 1 | |
| 3D lithography mask simulation | 3D lithography mask simulation 13.5 nm | Relative L2 Error3.1 | 1 |
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