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SOTA 3D lithography mask simulation benchmarks and papers with code | Wizwand
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3D lithography mask simulation
Benchmarks
Dataset Name
SOTA Method
Dataset Name
SOTA Method
Metric
Trend
Results
Last Updated
3D lithography mask simulation 11.2 nm
WGNO
Rel. L2 Error
2.8
1
4mo ago
3D lithography mask simulation 13.5 nm
WGNO
Relative L2 Error
3.1
1
4mo ago
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