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Benchmarks
Inverse Lithography on StdContact (Avg)
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2
EPE
Ours-150 iterations
0.464
10.832
21.2
31.568
Feb 22, 2026
EPE
PV
Updated 1mo ago
Evaluation Results
Method
Method
Links
EPE
PV
Ours-150 iterations
EPE threshold=15nm, It...
2026.02
2
39,186.4
ISPD'25
EPE threshold=15nm, It...
2026.02
3.8
36,172
Ours (PT+RL)
EPE threshold=3nm, Ite...
2026.02
6.5
39,907.5
DAC'23
EPE threshold=15nm
2026.02
8.6
39,997
Ours (PT)
EPE threshold=3nm, Ite...
2026.02
9
39,160.4
ISPD'25
EPE threshold=3nm, Ite...
2026.02
40.4
32,969.6
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