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Benchmarks
Inverse Lithography on StdMetal Avg
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EPE
DAC'23
-0.456
2.622
5.7
8.778
Feb 22, 2026
EPE
PV
Updated 1mo ago
Evaluation Results
Method
Method
Links
EPE
PV
DAC'23
EPE threshold=15nm
2026.02
0
24,928
ISPD'25
EPE threshold=15nm, It...
2026.02
0
21,631
Ours-150 iterations
EPE threshold=15nm, It...
2026.02
0
21,029.2
Ours (PT+RL)
EPE threshold=3nm, Ite...
2026.02
6.7
21,029.2
Ours (PT)
EPE threshold=3nm, Ite...
2026.02
7.2
21,507.6
ISPD'25
EPE threshold=3nm, Ite...
2026.02
11.4
19,083.8
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