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Benchmarks
Inverse Lithography on ICCAD 2013 (Avg)
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1.6
EPE
Ours-150 iterations
0.352
8.776
17.2
25.624
Feb 22, 2026
EPE
PV
Updated 1mo ago
Evaluation Results
Method
Method
Links
EPE
PV
Ours-150 iterations
EPE threshold=15nm, It...
2026.02
1.6
39,080.7
ISPD'25
EPE threshold=15nm, It...
2026.02
1.8
38,612.2
DAC'23
EPE threshold=15nm
2026.02
2.5
39,873
DAC'22
EPE threshold=15nm
2026.02
7.9
39,873
Ours (PT+RL)
EPE threshold=3nm, Ite...
2026.02
25.2
40,415.9
Ours (PT)
EPE threshold=3nm, Ite...
2026.02
27.3
40,524.1
ISPD'25
EPE threshold=3nm, Ite...
2026.02
32.8
38,611.5
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